GrabCAD 模型信息
Comb Drive (MEMS Actuator) · 模型 155252
MEMS Electrostatic Comb Drive Actuator Project Overview This project features a Finite Element Model (FEM) of a MEMS comb drive actuator, designed and simulated to demonstrate electrostatic actuation principles. The model was developed as part of the MCT 343: Mechatronics Applications course at the Faculty of Engineering, Ain Shams University. Technical Details The design focuses on accurate geometry for defining boundary conditions and material properties in a MEMS environment. Actuation Principle: Lateral electrostatic force generation. Simulation Scope: Coupled-field analysis (Electrostatic-Structural). Key Outputs: Total directional deformation, Von Mises stress/strain, and voltage distribution. Material Specifications The model is set up to evaluate performance using standard MEMS materials: Flexures/Beams: Polysilicon (Young's Modulus: 160 GPa). Structural Elements: Ni-Iron (Permalloy). References & Material Data Sources M. A. Hopcroft, W. D. Nix, and T. W. Kenny, "What is the Young's Modulus of Silicon?," Journal of Microelectromechanical Systems, vol. 19, no. 2, 2010. M. S. Scholz et al., "Mechanical Characterization of Electroplated Nickel-Iron," Sensors and Materials, vol. 13, no. 8, 2001. Software Used CAD Modeling: Autodesk Inventor Simulation: ANSYS Workbench (Files soon) Feel free to use it for your own projects or practice! "License: CC BY-NC-ND 4.0" This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
- 格式
- Autodesk Inventor、Rendering
- 分类
- Components、Electrical、Robotics
- 标签
- inventor21、inventor、finite element analysis、ansys、actuator、comb drive、mems
- 数据更新
- 2026-09-10T12:38:16Z
