GrabCAD 模型信息
Gas stick (Swagelok and Mks Instruments) · 模型 176537
Gas stick is utilized to deliver ultra high purity process and purge gases to a vacuum reactor of semiconductor equipment (PVD, PECVD, ICP-RIE, PEALD). BOM: Valve 6LVV-DPMR4-P (Swagelok)-1, Pressure regulator SS-HFM3B-VCR4-P-C (swagelok)-1, Pressure gauge PGU 50-MC02-C-4FSM (Swagelok)-1, Filter SS-SCF3-VR4-P-30 (Swagelok)-1, Valve 6LVV-DPFR4-P-C (Swagelok)-2, MFC 4 VCR Male 1179C01311CR1BV (Mks Instruments)_1
- 格式
- STEP / IGES、Rendering
- 分类
- Industrial design、Machine design、Piping
- 标签
- filter、mass flow controller、diaphragm valve、gas stick
- 数据更新
- 2026-10-24T12:10:22Z
